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Direct Write Optical Waveguide Fabrication in organic films using a Heidelberg Laser Writer
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Fabrication of Electrostatically Actuated MEMS Switch
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Optimization of Transmission Line Measurement (TLM) Structures for Contact Resistivity Determination
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Directed Self-Assembly using PS-b-PMMA Block Copolymers
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Ferroelectric HfO2 Thin Films for FeFET Memory Devices
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Silicon Photonic Devices Manufactured Using Double-Patterned i-Line Lithography
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CD Reduction through Annular Illumination and Sidewall Spacers
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Magnetic Nanocomposite Smart Skin
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Silicon Photonic Devices Manufactured using Double-Patterned i-Line Lithography
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OPTIMIZATION OF TRANSMISSION LINE MEASUREMENT (TLM) STRUCTURES FOR CONTACT RESISTIVITY DETERMINATION
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Directed Self-Assembly using PS-b-PMMA Block Copolymers
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Direct Write Optical Waveguide Fabrication in Organic Films using a Heidelberg Laser Writer
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Bayesian Analysis for Photolithographers
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Process Development Challenges Associated with Gallium Nitride Materials
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Ferroelectric HfO2 Thin Films for FeFET Memory Devices
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Fabrication of a MEMS Comb Drive Actuator
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CD Reduction Through Annular Illumination and Sidewall Spacers
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Fabrication of MEMS Electrostatically Actuated Switch
Mattias Herrfurth