Publication Date
5-15-2016
Document Type
Paper
Abstract
Comb drives are common in many microelectromechanical systems (MEMS) applications such as gyroscopes, accelerometers and resonators in different fields such as optical communication, wireless communication, and biomedical engineering. A comb drive actuator uses electrostatic forces between the combs to create capacitive actuation. The goal of these devices was to achieve a maximum displacement of the movable combs with the lowest amount of drive voltage. Comb drive actuators were designed and then fabricated. It was found that comb fingers were not defined properly as the fingers were either too skinny or have been completely destroyed. This was due to the STS etcher being down in the SMFL and using the Drytek Quad for the mechanical poly etch.
Recommended Citation
Banees, Adam
(2016)
"Fabrication of a MEMS Comb Drive Actuator,"
Journal of the Microelectronic Engineering Conference: Vol. 22:
Iss.
1, Article 2.
Available at:
https://repository.rit.edu/ritamec/vol22/iss1/2