CD Reduction through Annular Illumination and Sidewall Spacer Etch

Authors

Corey Shay, Rochester Institute of Technology

Publication Date

5-15-2016

Document Type

Paper

Recommended Citation

Shay, Corey (2016) "CD Reduction through Annular Illumination and Sidewall Spacer Etch," Journal of the Microelectronic Engineering Conference: Vol. 22: Iss. 1, Article 5.
Available at: https://repository.rit.edu/ritamec/vol22/iss1/5