Publication Date
2016
Document Type
Presentation
Recommended Citation
Cadareanu, Patsy
(2016)
"Silicon Photonic Devices Manufactured using Double-Patterned i-Line Lithography,"
Journal of the Microelectronic Engineering Conference: Vol. 22:
Iss.
1, Article 15.
Available at:
https://repository.rit.edu/ritamec/vol22/iss1/15
