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GaN Technology for High Frequency Applications
Timothy Boles

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Process Development of Sidewall Spacer Features for sub-300nm Dense Silicon FinFETs
Salwan Omar

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Fabrication of AlGaN/GaN High Electron Mobility Transistors
Vijay Gopal Thirupakuzi Vangipuram

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Optimization of Transmission Line Measurement (TLM) Structures for Specific Contact Resistivity Determination
Sidhant Grover

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Fabrication of a MEMS Comb Drive Actuator
Adam Banees

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Amorphous Carbon Hard Mask for Multiple Patterning Lithography
Timothy D. Horn

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Fabrication and Characterization of High-k Al2O3 and HfO2 Capacitors
Jesse Judd

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Development of CoSi2 Salicide Process
Oleg A. Kirillov

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Fabrication of a MEMS Comb Drive Actuator
Adam Banees

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Atomic Layer of Deposition of Ferroelectric HfO2
Casey J. Gonta