Publication Date
5-10-2016
Document Type
Poster
Recommended Citation
Cadareanu, Patsy
(2016)
"Silicon Photonic Devices Manufactured Using Double-Patterned i-Line Lithography,"
Journal of the Microelectronic Engineering Conference: Vol. 22:
Iss.
1, Article 16.
Available at:
https://repository.rit.edu/ritamec/vol22/iss1/16
