Publication Date
5-2016
Document Type
Poster
Recommended Citation
Herrfurth, Mattias
(2016)
"Fabrication of Electrostatically Actuated MEMS Switch,"
Journal of the Microelectronic Engineering Conference: Vol. 22:
Iss.
1, Article 13.
Available at:
https://repository.rit.edu/ritamec/vol22/iss1/13