Microelectronic Engineering Conference 1987
Papers
University Clean Room Management Program
William P. Acito Jr
Analysis of Ellipsometer Measurements
Wael A. Bizri
Introduction of Statistical Decision Making and Measurement Control Charts Into RIT Cleanroom Facility
Matthew L. Blair
Comparison of Silicon Dioxide Films
Brian J. Bluff
Desgin of an Ion Implantation Process Monitoring Chip on I.C.E and Provide a Methodology for Evaluation of Testing Results
Joseph J. Burkis
Post Exposure Silyation of a Positive Photoresist
Steven D. Carlson
Ideas to Asics
Kevin Clukey
Lateral Transistor Gain Calculations
Thomas A. Estelle
Diffusion Staining Techniques
Benjamin G. Eynon Jr
Integrated Injection Logic
Mark Grabosky
Computer Calculation of Bipolar Transistor Current Gain Using The Transistor Impurity Doping Profile
James Hermanowski
Design and Modeling of an Advance CMOS Process
John G. Hock
Design of an Advanced CMOS Process Test Chip
William J. Brocklehurst
Design and Fabrication of a Sixteen Bit PMOS Static RAM
Douglas J. Lange
Alternate Optimization of Process Parameters
Todd J. Layer
Mask and Plot Generation on the Calma
Glenn A. Marshall
Multilayer Resist Imaging Methods
James C. McKay
Design of Experiments and Diffusion Characterization
James M. Mortellaro
A Low Frequency C-V Measurement Technique and Analysis for Surface State Density Determination
Gregg R. Myers
Process Development for a Multi-Level Metal Process
Robert M. Newcomb
Growth of Anodic Al2O3 Films
Bruce Parmelee
Image Reversal with AZ5214E Photoresist for Etch and Liftoff
Michael A. Ryan
Characterization of Solid Source Phosphorus Doping Diffusion
Charles G. Smith
PMOS Operational Amplifier Evaluation
William J. Spezzano
PMOS Standard Cell Library
James C. Taylor
300 Baud Modem Design
Brian Terwilliger
SEM Studies In Microelectronics
Renee Vitullo
A Study of Optical Waveguides
James Weaver
Truth Table Test Fixture for PMOS Gate Array
William K. Wing