A Low Frequency C-V Measurement Technique and Analysis for Surface State Density Determination

Authors

Gregg R. Myers

Publication Date

1987

Document Type

Paper

Abstract

A flexible low frequency measurement system was set up for providing high quality low frequency C-V curves suitable for analysis and a method is described to analyze the low frequency C-V response for surface state density calculations. This method was used to calculate surface densities over a large portion of the band gap for several MOS capacitors.

Recommended Citation

Myers, Gregg R. (1987) "A Low Frequency C-V Measurement Technique and Analysis for Surface State Density Determination," Journal of the Microelectronic Engineering Conference: Vol. 1: Iss. 1, Article 23.
Available at: https://repository.rit.edu/ritamec/vol1/iss1/23