SEM Studies In Microelectronics

Authors

Renee Vitullo

Publication Date

1987

Document Type

Paper

Abstract

A review of the Scanning Electron Microscope (SEM) is presented with attention given to its applications in the field of Microelectronics.

Recommended Citation

Vitullo, Renee (1987) "SEM Studies In Microelectronics," Journal of the Microelectronic Engineering Conference: Vol. 1: Iss. 1, Article 33.
Available at: https://repository.rit.edu/ritamec/vol1/iss1/33