Microelectronic Engineering Conference 1998
Papers
Twin-Well CMOS Integration
Kenneth A. Gendron
Design and Fabrication of a Field Programmable Logic Array
Robert Cavagnaro
SIMOX CMOS Process Design and Fabrication
Andrew Phillips
Monolithic Integration of MEMs Structures and CMOS Circuitry
Alfredo Torrejon
Simulation and Tolerance Determination for Lateral CMOS Devices
Matthew Scarpino
Atmospheric Pressure CVD of TEOS
Daniel Ma
Titanium Nitride Diffusion Barriers and Schottky Diodes
Andrew Woodard
Work Function of Refractory Metals and Nitrides from CV Analysis
Benjamin M. Kaltaler
Stacked Floating Gate EEPROM
Ing-Cheng Chai
Comparison of Minority Carrier Lifetime Measurement by Surface Charge and Capacitance - Time Analysis
David Lundeen
Automated Wafer Testing
Michael Volo
Preparation of RIT for 157-nm Lithography
Brian Lee Porter
Quadrupole Apertures for 193nm Lithography
Michael Cangemi
Characterization of an Organic, Wet Develop, Broadband, Experimental Back Anti-Reflective Coating (BARC)
Robert Kress
Endpoint Detection in CMP Utilizing Thermal Imaging
Rick Anundson