Microelectronic Engineering Conference 2008
Papers
Investigation of Microplasma Cells Fabricated on Silicon Wafer
Koffi Abalo-Akuvi
Developing an Empirical Model for Tunable Porosity in Porous Nanocrystalline Silicon Membranes
Jon-Paul S. DesOrmeaux
Deep Submicron Pattern Formation for Selective Epitaxial Growth of II-V Semiconductors
Kenny Fourspring
Double Patterning Technique Using an Aluminum Hardmask
Brian Lindenau
Process Development for the Fabrication of a Double-Sided Photodiode
Kimberly E. Manser
Active Matrix Polymer Cholesteric Liquid Crystal Display (May 2008)
G B. Myhre, J P. Cox, K L. Marshall, T Z. Kosc, C A. Fromem, and S D. Jacobs
Reclaimed Silicon Solar Cells
Victor Prajapati
Fabrication of Thermally Actuated Micromirror Using CMOS Compatible Surface MEMs Process with XeF2 Release Etch
Christopher G. Shea
Process Characterization for Integration of Esaki Diodes into Aspect Ratio Trapping Material
Stuart A. Sieg
Biomedical Lance Ion Sensitive System
Charles D. Sturdevant
Characterization of P-N Junctions for Variation in Dose and Annealing Temperatures (May 2008)
Ryan Sweeney
Electrolysis-Bubble-Actuated Micropump
Suyana L. Villarroel
Unbalanced Mach-Zehnder Electro-Optic Modulator and Waveguide Components
Konstantin Yurchenko