Journal of the Microelectronic Engineering Conference | Vol 16 | Iss 1

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Microelectronic Engineering Conference 2006

Papers

Development of a Bilayer Metallization for RIT's Existing CMOS Process
Anthony Nguyen

Junction Integrity for Low Temperature Dopant Activation in Silicon
Geoff E. Watson

Formation of Self-Aligned Shallow Junction MOSFET Source/Drains by Proximity Rapid Thermal Diffusion
Scott W. Kenny

Fabrication and Test Characterization of Organic Poly(3,"' diallkylquaterthiophene) (PQT-12) Transistors
Amy Huang

Solutions to Resist Pattern Collapse for 45nm Lithography
Jonathan Reese

Fabrication of Eight Level Micro-lenses
Mayank Agrawal

Workfunction Tuning of Molybdenum Gate by Nitrogen Incorporation (May 2006)
Kazuya Tokunaga

BioMEMS Wireless Pressure Sensor
Daniel V. Pearce

End Point Detection of Plasma Etching Using Optical Methods
Jeff M. Czebiniak

Alignment in Electron Beam Lithography
Stoyan J. Jeliazkov

Development and Characterization of a RIE Process for Anisotropic Trenches in Silicon
Dan R. Ghiocel

Rostir, Inc.: The Fabrication of Ultra High Value chip Resistors & Business Plan Development
Jonathan E. Ross

Microfabrication and Commercialization of a Polymer-Absorption Chemical Gas Sensor
Stephen P. Parshall

Investigation into the Use of SU8 in High Aspect Ratio Applications
Kody Okafor

Microfabrication of Biocompatible Stimulation Electrode Arrays for Cochlear Implants
Ward A. Johnson