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Integration of High-K Dielectrics and Metal Gates into Submicron NMOS Transistors at RIT
Daniel J. Jaeger

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NMOS Transistors Design and Fabrication for S-Parameter Extraction
Adam L. James

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Esaki Tunnel Diodes Formed by Proximity Rapid Thermal Diffusion
Raymond T. Krom III

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Field Induced Band-to-Band Tunneling Effect Transistor (FIBTET)
David Pawlik

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Printing of Contact Holes for the 45nm Generation using Immersion Interference Lithography
Michael A. Slocum

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In-Situ Aberration Metrology Using Phase Wheel Targets
Matthew M. McQuillan

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Characterization and Optimization of a Bi-Layer BARC
Ryan M. Stamp

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Optical Modulation in Silicon and the ORPEL Device
Robin A. Joyce

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Electromigration Testing at RIT: Thermal Test Development
Lance W. Barron

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Characterization of Low Temperature Gate Dielectrics for Thin Film Transistors
G Robert Mulfinger

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Low Temperature Dopant Activation
Eric Woodard

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Integration of Nickel Monosilicide (NiSi) into an RIT SMFL NMOS Device
Phu Do

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Characterization of TiSi2 Process and Electrical Properties
Laurel E. Haydock

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Design and Manufacturing of Silicon PIN Diodes Utilizing Silicon on Insulator Technology
Patrick Warner

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Implementation of a J-ramp Test Process to Examine the Reliability of Dielectric Films
William Simpson

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Development of a Polysilicon Check Microvalve
William C. Hart

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Development of Macroporous Silicon for Bio-Chemical Sensing Applications
Tiffany M. Hoover

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MEMS Based Light Modulator
Shushil Shakya