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Advancing RIT to Submicron Technology: Design and Fabrication of 0.5μm N-channel MOS Transistors
Michael Aquilino

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Metal Source/Drain Schottky Field Effect Transistors - a Proof of Concept
Reinaldo A. Vega

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Design and fabrication of Tri-Gated FinFET
Mohammed R. Rahman

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Development of Thin Gate Oxides for Advanced CMOS Applications
Bryant Mann

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Capacitance-Voltage Analysis of High-? Dielectric on Strained Silicon
Mike Latham

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Work Function Engineering with Molybdenum and Molybdenum-Nitride Gate PMOS
Valarie Welsh

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The Interaction of Ultra-Pure Water and Photoresist in 193nm Immersion Lithography
James H. Park

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Phosphoric Acid as a High-Index Immersion Fluid
Karen R. Wolf

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Quadrupole Illumination Design for a 193nm Hyper-NA Exitech Immersion Stepper
Derek J. Summers

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Development of a Full Silicidation (FUSI) Process for Nickel Silicide
Yaser A. Alshehri

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Implementation of Backside Vias as an Alternative to Wafer Thinning
Michael E. Hathorn

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Face-to-Face Die Bonding and Direct Interconnects
Jeffrey A. Steinfeldt

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Silica Waveguide Design and Fabrication using Integrated Optics: A Link to Optical VLSI Photonics Integration for Semiconductor Technology
Anthony G. Navarro

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Investigation and Development of Air Bridges
Jay Cabacungan

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Design and Fabrication of a Micro-Size Thermionic Ionization/Flame Ionization Detector for Gas Phase Chemical Analytes
Robert Manley

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Fabrication and Characterization of a Packaged MEMS Gas Flow Sensor
Vee Chee Hwang

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Fabrication of Polysilicon Micro Valve Array
Jermaine White

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Study of Silicon Solar cell Array to Power MEMS Cantilever Actuator
Benjamin Kolodzie

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Fabrication of a Magnetically Actuated Torsional Beam
Gary A. Fino

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MEM's Optical Pyrometer
Edward Camacho

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Microfluidic Channels in Polymethyl-Methacrylate by Optimizing Aluminum Adhesion
George W. Woodruff III