PDF

A Chrome AR film for Binary Photomasks
Matthew Lassiter

PDF

Lithographic Process Evaluation by CD-SEM
Jason L. Burkholder

PDF

Investigation of Tantalum Silicon Oxide as an Attenuated Phase Shift Masking Material for 157nm Lithography
Matthew Malley

PDF

Effects of Nitrogen Implantation on Oxide Growth and Quality
Jason E. Meiring

PDF

Tantalum Pentoxide Deposition and Applications
Mark A. Bossard

PDF

MOSFETs with Variable Gate Oxide thickness by Selective Nitrogen Ion Implantation
Dave Rines

PDF

Design and Fabrication of Ring Gate Surface Junction Tunneling Devices
Eliott R. Hughes

PDF

Erbium-Doped Silicon Based LEDs
Joseph J. Miceli

PDF

Development of an Anisotropic, Selective Polycrystalline Silicon Dry Etch Process
Randy Supczak

PDF

Cobalt Silicide Formation and Patterning Technology
Neil S. Patel

PDF

Reactive sputtering of tantalum Nitrides for Diffusion Barrier Layers
Deepa Gazula

PDF

Deconfounding the Effects of Cu and Cr on Perceived Fe Contamination in Si Using an SPV Technique
Steven V. Nagel

PDF

The Effect of Fluorine on Boron Diffusion
Michele Honan

PDF

RIT Process and Device Simulation with Microtec
Charles R. Overbeck

PDF

The Beneficial Effects of Thin Film Stress in the Fabrication of a MEMS Device
Justin E. Brown

PDF

Investigation of Silicon Etching Effects for Monolithic Integration of MEMS with CMOS
Matthew J. Daniello

PDF

Process Development for an Anti-Reflective Micromechanical Modulator
Jason Neidrich

PDF

Copper Interconnect Development At RIT
Ashish Kushwaha

PDF

Development of LTO LPCVD Process for 6" Wafers at RIT
Karthika Sivagurunathan