Investigation of a Silicon Bulk Etched Incandescent Light Source

Authors

Keith A. Roehner

Publication Date

1999

Document Type

Paper

Abstract

An attempt of fabricating an incandescent light source was made at Rochester Institute of Technology. Filament length, width, material and shape as well as encapsulation method were under investigation in the experiment. Due to a design flaw, the devices could not be tested for functionality. This has since been fixed and another attempt will be made to fabricate the devices.

Recommended Citation

Roehner, Keith A. (1999) "Investigation of a Silicon Bulk Etched Incandescent Light Source," Journal of the Microelectronic Engineering Conference: Vol. 9: Iss. 1, Article 15.
Available at: https://repository.rit.edu/ritamec/vol9/iss1/15