Microelectronic Engineering Conference 1997
Papers
Design of Experiments Using TMA WorkBench
James Daniels
Pinched Diodes
Quynh Nguyen
The IRIS Project: CCD's, Image Recognition, and All That Jazz
Abram M. Detofsky
Integrated Electronics for Micro-Electromechanical Devices
Michael J. Frachel
The Fabrication of Corrugated Silicon Surfaces
Alicia N. Bineyard
BF2 Implanted Stacked a-Silicon Gate Capacitors
David Sanchez
Thin Gate Oxides over Nitrogen Implanted Silicon
Luis J. Lopez
Fabrication of Twin-well CMOS
Linh V. Phan
Investigation of Buried Channel PMOS
Chuan-Hsing Chen
Test Patterns for Chemical Mechanical Polish Characterization
Stanley J. Dobek
Development of Process Monitoring Monitoring Strategies for Contamination Control Utilizing a Surface Charge Analyzer
Raj Chakraborty
SOI via Wafer Bonding
Bart U. Meshelle
The Design of an Inorganic BARC
Andrew Veter
Resist Performance Using Spectroscopic Ellipsometry
Michael Y. Chan