Microelectronic Engineering Conference 1996
Papers
Flash EEPROM Fabrication
Keith E. Zawadzki
Calibration of Process and Electrical Models for RIT Vertical NPN Bipolar Junction Transistors
Lena Zavyalova
Development of a Polygate PMOS Process Compatible with Micromechanical Sensor Fabrication
Earl P. Schenck
Improvement in Polysilicon etch Process for the RIT Factory
Thomas F. Flynn Jr
Inorganic ARC for Use in Microlithography
David J. Stern