Publication Date
5-15-2016
Document Type
Presentation
Recommended Citation
Banees, Adam
(2016)
"Fabrication of a MEMS Comb Drive Actuator,"
Journal of the Microelectronic Engineering Conference: Vol. 22:
Iss.
1, Article 4.
Available at:
https://repository.rit.edu/ritamec/vol22/iss1/4