WEDAX Studies on the Hitachi S.E.M.

Authors

Ronald L. Quiett Jr

Publication Date

1988

Document Type

Paper

Abstract

The WEDAX (Wavelength Dispersive Analysis of X-rays) system incorporated Into the Hitachi S.E.M. is a method of performing chemical microanalysis of a material. The primary objective of this project was to bring up the system to full operating status and calibrate the WEDAX utilizing known samples of aluminum, copper, and silicon. As of May 1988, the S.E.M. resolution Is at 2K and the WEDAX Is still inoperable.

Recommended Citation

Quiett, Ronald L. Jr (1988) "WEDAX Studies on the Hitachi S.E.M.," Journal of the Microelectronic Engineering Conference: Vol. 2: Iss. 1, Article 27.
Available at: https://repository.rit.edu/ritamec/vol2/iss1/27