Publication Date
1988
Document Type
Paper
Abstract
A HIAC/ROYCO particle monitoring system is being installed to monitor aerosols in the RIT clean room. The system is controlled by a VAX mainframe computer using a Fortran program to read the data from the counter process It and write it to an output file. This file is used to generate control charts monitoring the particle levels at several locations in the cleanroom workspace.
Recommended Citation
McCracken, Scott H.
(1988)
"HIAC/ROYCO Particle Counter Installation,"
Journal of the Microelectronic Engineering Conference: Vol. 2:
Iss.
1, Article 24.
Available at:
https://repository.rit.edu/ritamec/vol2/iss1/24