A solar cell array to power a on board microelectromechanical polysilicon cantilever actuator was designed, fabricated and tested. The device composes of two solar cell arrays one array with 330 solar cells and another array with 300 solar cells. The device also consists of several cantilevers. The fabrication process involved over fifty process steps including nine photolithography levels. To optimize the performance of the solar cell array the entire process was simulated using SILVACO SUPREM simulation software. Electrical examination using ATLAS software allowed for parameter extraction of the computer-generated solar cells. Modeling the extracted parameters with device physics equations allowed for a SPICE level-2 analysis that could be verified through electrical testing of the actual fabricated solar cells. Measurements were made throughout the fabrication process. The completed devices were tested and pictures were taken of the cantilevers and solar cell array.
"Study of Silicon Solar cell Array to Power MEMS Cantilever Actuator,"
Journal of the Microelectronic Engineering Conference: Vol. 14:
1, Article 18.
Available at: https://repository.rit.edu/ritamec/vol14/iss1/18