Reinaldo Vega


It was the primary goal (and result) of the presented work to empirically demonstrate CMOS operation (i.e., inverter transfer characteristics) using metallic/Schottky source/drain MOSFETs (SFETs - Schottky Field Effect Transistors) fabricated on silicon-on-insulator (SOI) substrates - a first-ever in the history of SFET research. Due to its candidacy for present and future CMOS technology, many different research groups have explored different SFET architectures in an effort to maximize performance. In the presented work, an architecture known as a "bulk switching" SFET was fabricated using an implant-to-silicide (ITS) technique, which facilitates a high degree of Schottky barrier lowering and therefore an increase in current injection with minimal process complexity. The different switching mechanism realized with this technique also reduces the ambipolar leakage current that has so often plagued SFETs of more conventional design. In addition, these devices have been utilized in a patent pending approach that may facilitate an increase in circuit density for devices of a given size. In other words, for example, it may be possible to achieve circuit density equivalent to 65 nm technology using a 90 nm process, while at the same time preserving or reducing local interconnect density for enhanced overall system speed. Fabrication details and electrical results will be discussed, as well as some initial modeling efforts toward gaining insight into the details of current injection at the metal-semiconductor (M-S) interface. The challenges faced using the ITS approach at aggressive scales will be discussed, as will the potential advantages and disadvantages of other approaches to SFET technology.

Library of Congress Subject Headings

Metal semiconductor field-effect transistors--Design and construction; Metal oxide semiconductors, Complementary--Design and construction; Microelectronics--Design and construction

Publication Date


Document Type


Student Type


Degree Name

Microelectronic Engineering (MS)

Department, Program, or Center

Microelectronic Engineering (KGCOE)


Hirschman, Karl

Advisor/Committee Member

Kurinec, Santosh

Advisor/Committee Member

Rommel, Sean


Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works. Physical copy available through RIT's The Wallace Library at: TK7871.95 .V44 2006


RIT – Main Campus