Ferroelectric Thin Film Research at RIT

Authors

John P. Verostek

Publication Date

1991

Document Type

Paper

Abstract

At RIT, a sol-gel method is being used to synthesize lead zirconate titanate (PZT). Techniques available to characterize these films include scanning electron microscopy ellipsometry, energy dispersive analysis using X-rays (EDAX), and X-ray diffraction (XRD) to determine crystallinity. After heating above the Curie temperature, XRD indicated that a perovskite structure, known to be ferroelectric, was obtained for a PZT film.

Recommended Citation

Verostek, John P. (1991) "Ferroelectric Thin Film Research at RIT," Journal of the Microelectronic Engineering Conference: Vol. 5: Iss. 1, Article 26.
Available at: https://repository.rit.edu/ritamec/vol5/iss1/26