Publication Date
5-10-2019
Document Type
Presentation
Recommended Citation
Weiskittel, Kelly
(2019)
"Fabrication of Sub-300nm Fins at RIT by SADP,"
Journal of the Microelectronic Engineering Conference: Vol. 25:
Iss.
1, Article 28.
Available at:
https://repository.rit.edu/ritamec/vol25/iss1/28
