Publication Date
4-2019
Document Type
Poster
Recommended Citation
Weiskittel, Kelly
(2019)
"Fabrication of Sub-300 nm Fins at RIT by SADP,"
Journal of the Microelectronic Engineering Conference: Vol. 25:
Iss.
1, Article 27.
Available at:
https://repository.rit.edu/ritamec/vol25/iss1/27
