Publication Date
2019
Document Type
Presentation
Recommended Citation
Rubin, Leonard M.
(2019)
"Super Activation Obtained by Melt UV Laser Annealing of Highly Surface-Segregated Dopants in High Ge Content SiGe,"
Journal of the Microelectronic Engineering Conference: Vol. 25:
Iss.
1, Article 25.
Available at:
https://repository.rit.edu/ritamec/vol25/iss1/25
