Publication Date
4-2018
Document Type
Poster
Recommended Citation
Rosenfeld, Adam
(2018)
"Enhanced Boron Activationin Xenon Flash Lamp Annealed Polysilicon Through Pre-amorphization,"
Journal of the Microelectronic Engineering Conference: Vol. 24:
Iss.
1, Article 39.
Available at:
https://repository.rit.edu/ritamec/vol24/iss1/39
