Publication Date
2018
Document Type
Presentation
Recommended Citation
Huang, Eddie
(2018)
"Design and Fabrication of a Three-Axis Capacitive Accelerometer,"
Journal of the Microelectronic Engineering Conference: Vol. 24:
Iss.
1, Article 27.
Available at:
https://repository.rit.edu/ritamec/vol24/iss1/27
