Publication Date
4-17-2018
Document Type
Presentation
Recommended Citation
Doran, Jenna
(2018)
"Monolayer doping (MLD) for ultra-shallow junction MOSFET fabrication,"
Journal of the Microelectronic Engineering Conference: Vol. 24:
Iss.
1, Article 17.
Available at:
https://repository.rit.edu/ritamec/vol24/iss1/17
