Publication Date
5-9-2017
Document Type
Presentation
Recommended Citation
Eggleston, Mycahya
(2017)
"Development of a LFLE Double Pattern Process for TE Mode Photonic Devices,"
Journal of the Microelectronic Engineering Conference: Vol. 23:
Iss.
1, Article 8.
Available at:
https://repository.rit.edu/ritamec/vol23/iss1/8
