Publication Date
2015
Document Type
Presentation
Recommended Citation
Horn, Timothy D.
(2015)
"Amorphous Carbon Hard Mask for Multiple Patterning Lithography,"
Journal of the Microelectronic Engineering Conference: Vol. 21:
Iss.
1, Article 13.
Available at:
https://repository.rit.edu/ritamec/vol21/iss1/13
