"Black Silicon" by RIE for Photovoltaics

Authors

Jacob D. Lana

Publication Date

2014

Document Type

Paper

Abstract

Silicon-based solar cell technology continues to dominate the solar cell market making efficiency improvements to this class of devices sought after. A RIE process for creating “Black Silicon (BS)” was developed and integrated into a monocrystalline- Si solar cell process. Solar cells with BS exhibited an R_avg of 3.8% compared to 38.4% for solar cells with no antireflection apparatus (λ = 360-750 nm). BS solar cells were also found to have an EQE 16.4% higher than that of the control (λ = 360-1100 nm). On average J_sc and FF was higher for the BS solar cells as compared to the control however solar cell performance comparisons were corrupted by manufacturing defects resulting in poor diode characteristics across all fabricated devices.

Recommended Citation

Lana, Jacob D. (2014) ""Black Silicon" by RIE for Photovoltaics," Journal of the Microelectronic Engineering Conference: Vol. 20: Iss. 1, Article 5.
Available at: https://repository.rit.edu/ritamec/vol20/iss1/5