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Publication Date

2010

Document Type

Paper

Abstract

A set of MEMS Bio-Probes is designed, fabricated over a five-week period, then packaged and tested for functionality. The devices were fabricated to near completion however they were not brought to a point where they could be electrically tested. The fabrication of the devices went remarkable well. This indicates that there is potential for the device to work as originally intended.

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Engineering Commons

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