Publication Date
2001
Document Type
Paper
Abstract
The wafer fabrication facility at RIT has a primary goal of being a teaching facility. Tracking of the student run wafer lots is accomplished very effectively by MESA, a lot-tracking software package. The system is configured to collect information, but data base queries were not set up to display this information. MESA has the option of outputting information from the databases to a statistical software package called Quality Analyst. Quality Analyst displays control charts for the extracted data, providing quick, visual interpretation of the process in question. The adaptation of this software into the RIT Microelectronic Engineering fabrication facility has been achieved. Full realization of the impact on wafer yields has not been extracted so far, but insight into process improvement has already begun.
Recommended Citation
Gruener, Charles J.
(2001)
"Incorporation of Control charts into a Manufacturing Execution System,"
Journal of the Microelectronic Engineering Conference: Vol. 11:
Iss.
1, Article 7.
Available at:
https://repository.rit.edu/ritamec/vol11/iss1/7