Publication Date
2001
Document Type
Paper
Abstract
Carbon Nanotubes are researched to develop for new technology of transporting electrons in one dimension and have commercial potential as nanoscale transistors. Carbon Nanotubes need to be made by using chemical vapor deposition (CVD). This CVD technique is used to deposit thin film on substrates. As the gas decomposes, it frees up carbon atoms, which can recombine in the form of nanotubes. The conditions for the controlled and directed CVD growth of Nanotubes are planed being established with the use of thin film metal catalyst by using RIT’s CVD Reactor. This CVD reactor was designed and made for growing the specific, high yield, possibly phase pure, and multi-wall carbon nanotubes in RIT.
Recommended Citation
Hyun, Jun S.
(2001)
"Carbon Nanotubes: CVD Reactor Deign and Growth of Multi-Walled Carbon Nanotubes,"
Journal of the Microelectronic Engineering Conference: Vol. 11:
Iss.
1, Article 14.
Available at:
https://repository.rit.edu/ritamec/vol11/iss1/14