A simple null modulation-polarization method of measuring optical constants of metals has been adapted for operation with a KrF 248nm excimer laser. The approach requires only 3 optical components to extract the real and imaginary parts of the index of refraction (n,k). Experimental results will show good agreement to reference values for several metals (Cr, Au, Al) and Si.

Date of creation, presentation, or exhibit



Copyright 1995 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

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Document Type

Conference Paper

Department, Program, or Center

Microelectronic Engineering (KGCOE)


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