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Keywords
Clean room management, ellipometer measurements, silicon dioxide films, ion implantation process, silylation of a positive photoresist, ideas to asics, lateral transistor gain calculations, diffusion staining techniques, 16 bit pmos static, multilayer resist imaging methods, design of ~periments and diffusion characterization, micralign projection, low frequency ac signals, calma cad system, growth of anodic a1203 films system
Abstract
The papers which follow summarize the results of research performed by the graduating seniors from the Microelectronic Engineering Program at the Rochester Institute of Technology (RIT). In their final quarter of study, the student proposes a ten week research topic, to be completed with minimal supervision from the faculty. The proposal includes the relevance of the project to both the Microelectronics field and the Engineering program at RIT, as well as a tentative timetable and budget.
Publication Date
6-1-1987
Department
Microsystems Engineering (KGCOE)
Recommended Citation
Acito, Bill; Bizri, Wael; Blair, Matt; Bluff, Brian; Burkis, Joe; Carison, Steve; Clukey, Kevin; Estelle, Tom; Eynon, Ben; Grabosky, Mark; Hermanowski, Jim; Hock, John; Brocklehurst, Bill; Lange, Doug; Layer, Todd; Lekas, Jim; Macaluso, Steve; Mager, Paul; Marshall, Glen; McKay, Jim; Mortellaro, Jim; Muniak, Karen; Myers, Gregg; Newcomb, Bob; Nour, Sasson; Parmelee, Bruce; Ryan, Mike; Scoopo, John; Smith, Chuck; Spezzano, Bill; Taylor, Jim; Terwilliger, Brian; Vitullo, Renee; Weaver, Jim; Webb, Dale; and Wing, Bill, "5th MEEC Conference 1987" (1987). Annual Microelectronic Engineering Conference (AMEC) Archive. 1.
https://repository.rit.edu/meec_archive/1
