Abstract
The gas and effective electron temperatures have been estimated for atmospheric microplasma by means of optical emission spectroscopy. The results have shown that the microplasma exhibits nonequilibrium and, as its size is reduced, the two temperatures depart from each other, enhancing the nonequilibrium characteristic. The effect of methane and oxygen concentrations has also been studied, showing that gas mixtures have an important effect on the microplasma state.
Publication Date
4-17-2008
Document Type
Article
Department, Program, or Center
Microelectronic Engineering (KGCOE)
Recommended Citation
D. Mariotti , Appl. Phys. Lett. 92, 151505–151509 (2008). https://doi.org/10.1063/1.2912039
Campus
RIT – Main Campus
COinS
Comments
Copyright 2008 American Institute of Physics
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The following article appeared in Applied Physics Letters 92, 151505 and may be found at https://doi.org/10.1063/1.2912039