Rakesh Dhull


This thesis research proposes a novel and simple means of tilting micromirror on a microdroplet by utilizing thermocapillary actuated droplet deformation. Device theory, device design, fabrication, packaging, testing and results are discussed to demonstrate the operation of a 2-degrees-of-freedom (2- DOF) scanning micromirror. Thermocapillary, or Marangoni, effect and contact angle hysteresis are employed to control the droplet shape and position. Hysteresis in different liquids is studied with its influence on the stability of the droplet. The device consists of a micromirror placed onto a microdroplet, and can produce a 6.5° tilting angle when actuated at 30 V. The tilting angle is found to be almost linearly dependent on actuation voltage. Linear, square and circular laser scanning patterns were drawn to demonstrate its successful operation. This technique shows potential applications in scanning micromirror and display technology. Finally, possible future work is discussed to further improve the device performance.

Library of Congress Subject Headings

Optoelectronic devices--Design and construction; Light modulators--Design and construction; Microelectromechanical systems--Design and construction; Hysteresis

Publication Date


Document Type


Department, Program, or Center

Microelectronic Engineering (KGCOE)


Moon, James


Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works. Physical copy available through RIT's The Wallace Library at: TK8360.L5 D48 2010


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