Silicon based photonic devices have been demonstrated by industrial leaders in the microelectronic industry. The need for system integration has pushed the development of silicon as a photonic material to new levels. This report presents details on a silicon-on-insulator waveguide structure based on a metal Bragg reflection diffraction grating, which utilizes a change in refractive index caused by a carrier change to induce optical modulation. The motivation of the device was for use as an electrically controlled optical modulator operating in the near infrared region; an optically controlled device has been demonstrated in previous work. This study has thoroughly examined the process development and electrical characteristics of the device through use of Silvaco(TM) simulation software and experimentation. The device has exhibited excellent optical characteristics and has shown promise as an optical modulator and a sub-bandgap photon detector. A silicon-on-insulator waveguide structure specified to operate at a wavelength of 1053nm has been simulated, designed, fabricated and tested both optically and electrically. Future iterations have been simulated and designed to take advantage of advanced microelectronic processes

Library of Congress Subject Headings

Silicon-on-insulator technology; Wave guides; Electrooptics

Publication Date


Document Type


Department, Program, or Center

Microelectronic Engineering (KGCOE)


Hirschman, Karl

Advisor/Committee Member

Kurinec, Santosh

Advisor/Committee Member

Rommel, Sean


Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works. Physical copy available through RIT's The Wallace Library at: TK7871.85 .H37 2005


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