A mathematical model of the Nikon Lampas Reflection Measuring Microscope for the fine-line lithography in integrated circuit manufacture has been developed. Optical intensity profiles of a perfect line were computed using computer software supplied by the National Bureau of Standards. The programs were modified for the Lampas microscope. From line profiles, the accuracy of the microscope was calculated. The microscope is accurate down to 6/10 of a micron. All lines below 6/10 of a micron were unresolved.
Library of Congress Subject Headings
Integrated circuits--Design and construction--Technique; Measuring microscopes--Mathematical models
Photographic and Imaging Technology (BS)
Department, Program, or Center
School of Photographic Arts and Sciences (CIAS)
Bennett, William O., "Mathematical Modeling of the Nikon Lampas Reflection Measuring Microscope" (1985). Thesis. Rochester Institute of Technology. Accessed from
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