Eric Harvey


In this thesis we present design, fabrication and testing of several photonic devices on a silicon-on-insulator (SOI) substrate. The historical developments in micro-optic technology including problems it has faced and its current state of maturity is outlined. The most recent integration trends of electronics and optics, particularly the transition of micro-optics to silicon on insulator platform will be reviewed. With this foundation in silicon photonics several rib waveguide structures including directional couplers, WDM couplers, y-branches and MMI splitters are designed, simulated, and fabricated on an SOI substrate. Beam propagation method (BPM) was used in the modeling of these devices. Computation time is reduced by using a least squared regression to predict coupler behavior and losses in devices with varying dimensions and shape. A fabrication procedure is developed, characterized and implemented. The final devices are tested, and qualitative results provided.

Library of Congress Subject Headings

Silicon-on-insulator technology; Optical wave guides--Design and construction; Optical wave guides--Materials; Silicon--Optical properties

Publication Date


Document Type


Department, Program, or Center

Electrical Engineering (KGCOE)


Abushagur, Mustafa

Advisor/Committee Member

Fuller, Lynn

Advisor/Committee Member

Venkataraman, Jayanti


Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works. Physical copy available through RIT's The Wallace Library at: TK8330 .H37 2006


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