Time Dependence of Hot Electron Induced Surface States

Authors

Joseph P. Magliocco

Publication Date

1988

Document Type

Paper

Abstract

Hot electron injection was investigated using the HP 4145B SPA to induce Fewler- Nordheim tunneling. High frequency and quasi-static capacitance-voltage (C-V) measurements were taken on p-substrate MOS capacitors in order to generate the distribution of surface states throughout the band gap. The results proved inconclusive with no deformation of the low frequency C-V technique being observed.

Recommended Citation

Magliocco, Joseph P. (1988) "Time Dependence of Hot Electron Induced Surface States," Journal of the Microelectronic Engineering Conference: Vol. 2: Iss. 1, Article 23.
Available at: https://repository.rit.edu/ritamec/vol2/iss1/23